DEVELOPMENT OF THE METHOD OF CALIBRATION OF THE SCANNING PROBE MICROSCOPE

Abstract

For several decades, in almost all developed countries in various sectors of the economy there has been rapid progress in the field of nanotechnology. In this regard, research aimed at improving the instrumentation of nanotechnology has reached a new progressive level.

Of course, large-scale development of the nanoindustry is impossible without the appropriate metrological support (MO). In world practice, to obtain the most reliable and accurate results of nano-measurements, widely used scanning probe microscope (SPM), which allows three-dimensional measurements of deep nanostructures, ie structures with a depth greater than the width. The main problem that arises when performing three-dimensional measurements using SPM is the lack of communication between the horizontal and vertical steps of the sensor when bypassing the surface of the nanoobject.

The article investigates the methods of correction in the measurement of nanoobjects with a deep structure using a scanning probe microscope and developed a method of three-dimensional calibration of the sensor step size on the surface of the measuring nanoobject. The existing methods of such measurements are analyzed and it is proved that in most cases when mathematically calculating the sensor pitch in the nanometer range and subsequent digital processing of measurement results in the on-line mode, there is no connection between horizontal and vertical movements, which can lead to significant deviations between real the size of the measuring object and its digital model. A physical model of the measurement process is proposed, which consists in the fact that the microscope reflects the height of the surface in orthogonal raster form. A technique for correcting digital images of a three-dimensional surface of a nanoobject in accordance with a standard has been developed, which makes it possible to make adjustments to the obtained measurement results on-line.